220V Helium Mass Spectrometer SFJ-16C

Features :

220V Helium Mass Spectrometer SFJ-16C is an advanced vacuum leak detection device for industrial use.
It is designed to detect the presence of helium gas at a rate of 2.5*10^-9 Pa.m³/s, with a response time of less than 1 second.
The built-in ion source consists of two iridium coated yttrium oxide, which are capable of being automatically switched.
Helium Leak Detector is ideal for industrial applications, and it is a reliable and cost-effective solution for vacuum leak detection.

Specifications :

220V Helium Mass Spectrometer Leak Detector for Semiconductor Industry
Technical Parameter	Specification
Product Name	220V Helium Mass Spectrometer SFJ-16C
Max Allowable Leak Detection Pressure (Pa)	1800Pa
Detectable Quality	2, 3, 4 (H2, He3, He4)
Operating temperature	0~40°C
Mini Leak Detection Rate(Pa.m³/s)/Vacuum Mode	5*10^-13 Pa.m³/s
Communication Interface	RS232/485, LAN
Leak rate display	Numbers, Bar Charts, Graphs
Dimension	7554671180mm
User Interface	7inch Color Touch Screen
Detection Method	Helium Leak Detection
Mini Leak Detection Rate(Pa.m³/s)/sniffer Mode	2.5*10^-9
Response Time (s)	<1
Startup Time (min)	≤1.58
Ion Source	2pcs, Iridium coated yttrium oxide, automatic switching
Main-machine Interface	7inch Color LCD Touch Screen
Backing Pumps	Rotary vane vacuum pump
I/O Input/Output Interface	8 Inputs and 8 outputs
Language	English/Chinese
Power Supply	AC220V, 50Hz/60Hz

Catalog : PDF

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