220V Helium Mass Spectrometer SFJ-16C

Features :

  1. 220V Helium Mass Spectrometer SFJ-16C is an advanced vacuum leak detection device for industrial use.
  2. It is designed to detect the presence of helium gas at a rate of 2.5*10-9 Pa.m3/s, with a response time of less than 1 second.
  3. The built-in ion source consists of two iridium coated yttrium oxide, which are capable of being automatically switched.
  4. Helium Leak Detector is ideal for industrial applications, and it is a reliable and cost-effective solution for vacuum leak detection.

Specifications :

220V Helium Mass Spectrometer Leak Detector for Semiconductor Industry
Technical Parameter Specification
Product Name 220V Helium Mass Spectrometer SFJ-16C
Max Allowable Leak Detection Pressure (Pa) 1800Pa
Detectable Quality 2, 3, 4 (H2, He3, He4)
Operating temperature 0~40°C
Mini Leak Detection Rate(Pa.m3/s)/Vacuum Mode 5*10-13 Pa.m3/s
Communication Interface RS232/485, LAN
Leak rate display Numbers, Bar Charts, Graphs
Dimension 755*467*1180mm
User Interface 7inch Color Touch Screen
Detection Method Helium Leak Detection
Mini Leak Detection Rate(Pa.m3/s)/sniffer Mode 2.5*10-9
Response Time (s) <1
Startup Time (min) ≤1.58
Ion Source 2pcs, Iridium coated yttrium oxide, automatic switching
Main-machine Interface 7inch Color LCD Touch Screen
Backing Pumps Rotary vane vacuum pump
I/O Input/Output Interface 8 Inputs and 8 outputs
Language English/Chinese
Power Supply AC220V, 50Hz/60Hz

Catalog : PDF




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