Specifications :
| Resolution | 4.5nm@30KV(SE); 6nm@30KV(BSE) | |
| Magnification | Negative Magnification: 15x~250000x; Screen Magnification: 30x~500000x | |
| Electron Gun | Tungsten Heated Cathode-Pre Centered Tungsten Filament Cartridge | |
| Accelerating Voltage | 0~30KV | |
| Lens System | Three-level Electromagnetic Lens (Tapered Lens) | |
| Objective Aperture | Molybdenum Aperture Adjustable Outside Vacuum System | |
| Specimen Stage | Five Axes Stage | |
| Travel Range | X(Auto) | 0~50mm |
| Y(Auto) | 0~50mm | |
| Z(Manual) | 0~25mm | |
| R(Manual) | 360ยบ | |
| T(Manual) | -5ยบ~90ยบ | |
| Max Specimen Diameter | 150mm | |
| Detector | SE: High Vacuum Secondary Electron Detector (With Detector Protection) | |
| Modification | Stage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser | |
| Accessories | CCD,LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
| Vacuum System | Turbo Molecular Pumps;Rotation Pump | |
| Electron Beam Current | 10pA~0.1ฮผA | |
| PC | Customized Dell Work Station | |
| Model No | A63.7062 | |
| Standard Magnification | 5x-250000x | |
| Head Inclination | 90ยฐ | |
| Head Interpupillary | 54-75mm | |
| Head Specifications | 4.5nm@1KV(SE)
6nm@30KV(BSE) |
|
| Objective | Detector SE | |
| Working Stage Spec. | Five Axes Stage(Auto X/Y, Manual Z/R/T), Max Specimen Dia. 150mm | |
| Transmit Light | Tungsten Filament Catridge, Voltage 0-30KV | |
| Other Specification | Turbo Molecular Pump, Mechanical Pump | |
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