Specifications :
| Resolution | 1nm@30KV(SE); 3nm@1KV(SE); 2.5nm@30KV(BSE) | |
| Magnification | 15x~800000x | |
| Electron Gun | Schottky Emission Electron Gun | |
| Electron Beam Current | 10pA~0.3μA | |
| Accelerating Voatage | 0~30KV | |
| Vacuum System | 2 Ion Pumps, Turbo Molecular Pump, Mechanical Pump | |
| Detector | SE: High Vacuum Secondary Electron Detector (With Detector Protection) | |
| BSE: Semiconductor Four Segmentation Back Scattering Detector | ||
| CCD | ||
| Specimen Stage | Five Axes Eucentric Motorized Stage | |
| Travel Range | X | 0~150mm |
| Y | 0~150mm | |
| Z | 0~60mm | |
| R | 360º | |
| T | -5º~75º | |
| Max Specimen Diameter | 320mm | |
| Modification | EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser Etc. | |
| Accessories | X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine Etc. | |
| Model No | A63.7081 | |
| Standard Magnification | 15x-500000x | |
| Head Inclination | 90º | |
| Head Interpupillary | 54-75mm | |
| Head Specifications | 1nm@30KV(SE)
3nm@1KV(SE) 2.5nm@30KV(BSE) |
|
| Objective | Detector SE, BSE, CCD | |
| Working Stage Spec. | Five Axes Eucentric Motorized Stage. Large Size, Max Specimen Dia. 320mm | |
| Transmit Light | Schottky Field Emission Gun, Beam Current 10pA-0.3μA, Voltage 0-30KV | |
| Other Specification | 2 lon Pumps, Turbo Molecular Pump, Mechanical Pump | |
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